Balanced runners synchronizing motion of masses in micromachined devices

ABSTRACT

Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

FIELD OF THE DISCLOSURE

This disclosure relates to microelectromechanical systems (MEMS) deviceshaving multiple moving masses.

BACKGROUND

Gyroscopes (sometimes referred to simply as “gyros”) are devices whichare sensitive to rotation, and therefore which can be used to detectrotation. Microelectromechanical systems (MEMS) gyroscopes typicallyinclude a movable body, sometimes referred to as a “proof mass,” towhich an electrical signal is applied to produce motion predominantlyalong a particular axis. This is referred to as driving the proof mass,and the axis along which the proof mass is driven is sometimes referredto as the “drive axis.” When the gyroscope experiences rotation, theproof mass additionally moves along an axis different than the driveaxis, sometimes referred to as the sense axis. For some MEMS gyroscopes,rotation causes the proof mass to move linearly along the sense axis.For others, rotation causes the proof mass to rotate. The motion of theproof mass along the sense axis is detected, providing an indication ofthe rotation experienced by the gyroscope.

Some MEMS gyroscopes include multiple proof masses that are mechanicallycoupled together. The proof masses can be coupled together in an attemptto provide synchronous motion while rejecting undesired motion in eitherthe sense or drive axes.

SUMMARY OF THE DISCLOSURE

Micromachined inertial devices are presented having multiplelinearly-moving masses coupled together by couplers that move in alinear fashion when the coupled masses exhibit anti-phase motion. Thecouplers move in opposite directions of each other, such that onecoupler on one side of the movable masses moves in a first lineardirection and another coupler on the opposite side of the movable massesmoves in a second linear direction opposite the first linear direction.The couplers ensure proper anti-phase motion of the masses.

In certain embodiments, a multiple-mass, balanced microelectromechanicalsystems (MEMS) device is provided that comprises a substrate, a firstproof mass coupled to the substrate by a first tether and configured tomove linearly, and a second proof mass coupled to the substrate by asecond tether and configured to move linearly. The multiple-mass,balanced MEMS device further comprises a first coupler coupling thefirst and second proof masses together and configured to move linearlywhen the first proof mass moves in a first direction and the secondproof mass moves in a second direction opposite the first direction.

In certain embodiments, a method of operating a multiple-mass, balancedmicroelectromechanical systems (MEMS) device is provided that comprisesmoving a first proof mass and second proof mass linearly in anti-phasemotion, and linearly translating a first coupler coupling the first andsecond proof masses as the first and second proof masses move linearlyin anti-phase motion.

In certain embodiments, a multiple-mass, balanced microelectromechanicalsystems (MEMS) device is provided, comprising a substrate, a first proofmass coupled to the substrate by a first tether and configured to movelinearly, and a second proof mass coupled to the substrate by a secondtether and configured to move linearly. The multiple-mass, balanced MEMSdevice further comprises means for inhibiting in-phase motion of thefirst and second proof masses.

In certain embodiments, a synchronized mass microelectromechanicalsystems (MEMS) device is provided, comprising a substrate, a first proofmass coupled to the substrate by a first tether and configured to movelinearly parallel to each of first and second transverse axes, a secondproof mass coupled to the substrate by a second tether and configured tomove linearly parallel to each of the first and second transverse axes,a third proof mass coupled to the substrate by a third tether andconfigured to move linearly parallel to each of the first and secondtransverse axes, and a fourth proof mass coupled to the substrate by afourth tether and configured to move linearly parallel to each of thefirst and second transverse axes. The device further comprises a firstcoupler coupling the first and second proof masses together andconfigured to move linearly parallel to the first axis when the firstproof mass moves in a first direction parallel to the second axis andthe second proof mass moves in a second direction opposite the firstdirection parallel to the second axis.

In certain embodiments, a method of operating a synchronized massmicroelectromechanical systems (MEMS) device having four proof massescoupled together is provided, the method comprising moving the fourproof masses in linear anti-phase motion parallel to a first axis,linearly translating a first coupler coupling first and second proofmasses of the four proof masses when the four proof masses move inlinear anti-phase motion parallel to the first axis, and linearlytranslating a second coupler coupling third and fourth proof masses ofthe four proof masses when the four proof masses move in linearanti-phase motion parallel to the first axis.

In certain embodiments, a synchronized mass, balancedmicroelectromechanical systems (MEMS) gyroscope is provided, comprisinga substrate, first, second, third, and fourth proof masses suspendedabove and coupled to the substrate and each configured to translatelinearly parallel to first and second axes, and means for enforcinglinear anti-phase motion of the four proof masses parallel to the firstaxis.

BRIEF DESCRIPTION OF THE DRAWINGS

Various aspects and embodiments of the application will be describedwith reference to the following figures. It should be appreciated thatthe figures are not necessarily drawn to scale. Items appearing inmultiple figures are indicated by the same reference number in all thefigures in which they appear.

FIG. 1A is a block diagram representation of a microelectromechanicalsystems (MEMS) device having multiple proof masses coupled together bylinearly moving runners, according to an embodiment of the presentapplication.

FIGS. 1B-1E illustrate four states of antisymmetric (or “anti-phase”)operation of the MEMS device of FIG. 1A.

FIG. 1F is a block diagram representation of a gyroscope having multipleproof masses coupled together by linearly moving runners, includingmultiple oppositely-moving runners on a same side of the proof masses,according to an embodiment of the present application.

FIG. 2A illustrates a gyroscope having multiple proof masses coupledtogether by linearly moving runners, of the type illustrated in FIG. 1A.

FIG. 2B is a close-up view of a tether of the type included in thegyroscope of FIG. 2A to couple a proof mass to a movable shuttle.

FIG. 2C is a close-up view of an anchor and pivot point of the typeincluded in the gyroscope of FIG. 2A.

FIG. 2D is a close-up view of a hinge of the type included in thegyroscope of FIG. 2A.

FIG. 2E-1 is a cartoon representation of a pivoting linkage of the typeincluded in the gyroscope of FIG. 2A.

FIG. 2E-2 illustrates a first state of deformation of the structure ofFIG. 2E-1 in which the pivoting linkage segments pivot in oppositedirections.

FIG. 2E-3 illustrates a second state of deformation of the structure ofFIG. 2E-1 in which the pivoting linkage segments pivot in the samedirection as each other.

FIG. 2F-1 is a close-up view of a box spring connector for couplingneighboring proof masses in the gyroscope of FIG. 2A.

FIG. 2F-2 illustrates permitted motion of the structure of FIG. 2F-1.

FIG. 2F-3 illustrates prevented motion of the structure of FIG. 2F-1.

FIG. 2G is a close-up view of a coupler coupling the linear runners to apivoting linkage of the gyroscope of FIG. 2A.

FIG. 2H illustrates a gyroscope having multiple proof masses coupledtogether by linearly moving runners, of the type illustrated in FIG. 1F.

FIG. 2I illustrates a state of deformation of the gyroscope of FIG. 2Hin which the proof masses exhibit anti-phase motion in the y-direction.

FIG. 2J is a cartoon representation of two of the balanced runners ofthe gyroscope of FIG. 2I, showing a state of deformation.

FIG. 2K illustrates an alternative to the configuration of FIG. 2J inwhich the balanced runners of a gyroscope are coupled together by alinkage substantially perpendicular to the lengths of the runners.

FIG. 2L illustrates an alternative runner configuration to that shown inFIG. 2H, in which multiple linearly-arranged runners are constrained ontheir inner and outer edges.

FIG. 2M illustrates an alternative to the configuration of FIG. 2L, inwhich multiple linearly-arranged runners are directly coupled to eachother.

FIG. 2N illustrates a state of deformation of a structure like thatshown in FIG. 2M.

FIG. 3A is a block diagram representation of a MEMS device having fourproof masses coupled together by linearly moving runners.

FIGS. 3B-3E illustrate four states of antisymmetric operation of theMEMS device of FIG. 3A.

FIG. 4A illustrates a first state of deformation of a MEMS gyroscopehaving a proof mass arrangement of four coupled proof masses andlinearly moving runners coupling the proof masses.

FIG. 4B illustrates a second state of deformation of the MEMS gyroscopeof FIG. 4A.

FIG. 4C illustrates a synchronized mass gyroscope according to anon-limiting embodiment of the present application.

FIG. 5 illustrates an automobile which may employ MEMS devices of thetypes described herein, according to a non-limiting embodiment of thepresent application.

DETAILED DESCRIPTION

Aspects of the present disclosure provide micromachined ormicroelectromechanical systems (MEMS) devices having multiple proofmasses coupled together by linearly moving mechanical couplers whichconstrain the motion of the coupled proof masses to synchronous, linearanti-phase motion. The couplers move linearly as the proof massesexhibit linear anti-phase motion, rather than pivoting or rotating.Thus, they are referred to herein as “runners” in at least someembodiments, and serve as coupling and motion transfer mechanisms.

In some embodiments, the MEMS device includes multiple such runnersconfigured to move in opposite directions of each other, thus providingbalanced operation with no net momentum from the linear motion of therunners. This may prevent unwanted motion of the proof masses, ensuringrejection of linear and angular accelerations. The oppositely-movingrunners may have substantially the same masses and/or displacements aseach other.

In some embodiments, two or more proof masses of a MEMS device arearranged in a proof mass arrangement, with runners positioned onopposite sides of the proof mass arrangement. The runners on oppositesides of the proof mass arrangement may move linearly in oppositedirections of each other, thus providing balanced operation. In someembodiments, multiple oppositely moving runners are provided both on thesame side of the proof mass arrangement as each other and on oppositesides of the proof mass arrangement as each other. Thus, in someembodiments, four or more runners may be provided in a MEMS device.

Various types of MEMS devices may include runners of the types describedherein. For example, MEMS gyroscopes, accelerometers, and resonators mayinclude two or more proof masses coupled by balanced runners of thetypes described herein. Other micromachined devices are possible.

According to an aspect of the present disclosure, runners of the typesdescribed herein are included in a MEMS gyroscope, coupling two linearlymoving proof masses of the MEMS gyroscope. The couplers may beconfigured to move linearly when the proof masses are driven along adrive axis and/or when sensing motion of the proof masses along a senseaxis. For example, the couplers may be arranged to move linearly inresponse to the gyroscope experiencing rotation. The runners may resistmoving when the gyroscope experiences shock or other forms ofacceleration (e.g., linear or angular acceleration), and thereforegyroscopes implementing such couplers may exhibit reduced accelerationsensitivity and may be referred to as acceleration insensitivegyroscopes. In some embodiments, the runners are arranged to providesynchronous motion in both drive and sense modes of the gyroscope orother MEMS sensor.

In some embodiments, a synchronized mass gyroscope is provided,including four proof masses coupled by runners of the types describedherein. The runners may be configured to enforce linear, anti-phasemotion of the four coupled proof masses. This may facilitate momentumbalanced operation of the synchronized mass gyroscope. Additionally, therunners may themselves be momentum-balanced so that their own motiondoes not impart a net momentum to the gyroscope.

FIG. 1A illustrates in simplified form a MEMS device according to anaspect of the present application, having two proof masses coupled bylinearly moving couplers (“runners”) which resist (or inhibit) symmetricmotion (also referred to as “in-phase” motion) of the proof masses andallow antisymmetric motion (also referred to as “anti-phase” motion) ofthe proof masses. The MEMS device 100 includes a first proof mass 102 a,second proof mass 102 b, a substrate 104, tethers 106 a, 106 b, 106 c,106 d, 106 e, and 106 f, runners 108 a and 108 b, and a coupler 114.

The proof masses 102 a and 102 b are shown in simplified block diagramform, but may have any suitable size and shape, and may be formed of anysuitable material(s). In some embodiments, the proof masses 102 a and102 b are substantially rectangular, such as being substantially square.They may be formed of silicon, or another suitable material. The proofmasses 102 a and 102 b may be substantially identical in at least someembodiments.

The substrate 104 may be a silicon substrate (e.g., a silicon die cutfrom a silicon wafer) or other substrate compatible with micromachiningtechniques. In some embodiments, the substrate 104 is formed of the samematerial as the proof masses 102 a and 102 b. The proof masses 102 a and102 b may be formed from the substrate 104 by suitable micromachiningtechniques, such as through lithography and etching processes. In someembodiments, formation of the proof masses 102 a and 102 b may involve arelease step, in which the proof masses are released from the substrate104 and thus separated from the substrate by a gap (or cavity).

As shown, the proof masses 102 a and 102 b are coupled to the substrate104 by tethers 106 a-106 f, which may take any suitable form. Anon-limiting example of a suitable tether structure is a folded tether,an example of which is described below in connection with FIG. 2B. Thetethers allow for the proof masses 102 a and 102 b to move relative tothe substrate 104. The proof masses may have two degrees of freedom,meaning they can generally move along at least two axes. This allows forthe proof masses to operate in both a drive mode, in which they areactively driven by application of a suitable electrical signal, and asense mode, in which they move in response to experiencing a condition,such as a Coriolis force (in the case of a gyroscope). The proof massesmay also be configured to respond symmetrically with independentresponses in the two degrees of freedom in response to acceleration (inthe case of an accelerometer). As a non-limiting example, consideringthe situation in which the MEMS device 100 is a gyroscope, the proofmasses 102 a and 102 b may be configured and coupled to the substrate104 such that they may each move along both the x and y-axes. Forexample, the proof masses 102 a and 102 b may be driven along the x-axisand may move along the y-axis in response to rotation R of the MEMSdevice around a point 112. The tethers 106 a-106 f may have a suitableconfiguration to allow such motion. Moreover, alternative or additionaltethers may be included to allow such motion. Thus, it should beappreciated that the illustration of tethers 106 a-106 f represents ageneralization for coupling the proof masses 102 a and 102 b to thesubstrate 104, and that various tethering arrangements may beimplemented in accordance with aspects of the present application. FIG.2A, described below, provides one example of a suitable tetheringarrangement.

The coupler 114 represents a generalization of a mechanism for couplingthe proof masses 102 a and 102 b together. The coupler 114 may be a boxspring connection, a straight beam connection, or other suitablecoupler. Alternative proof mass-to-proof mass coupling schemes may beimplemented, including the use of additional couplers. Some examples aredescribed below in connection with FIG. 2A. The coupler 114 may be usedin an attempt to provide synchronous motion of the proof masses 102 aand 102 b. An example of such motion is described below in connectionwith FIGS. 1B-1E.

The proof masses 102 a and 102 b are additionally coupled by runners 108a and 108 b, which move, or translate, linearly when the proof masses102 a and 102 b exhibit antisymmetric (or “anti-phase”) motion in they-direction. The runners are configured to move linearly in thedirections illustrated by the arrows 110 a and 110 b, in this case thepositive and negative x-direction. More specifically, the runners 108 aand 108 b constrain the proof masses 102 a and 102 b to linearanti-phase motion, themselves moving linearly as the proof masses 102 aand 102 b move in an anti-parallel fashion along the y-direction, butresist or inhibit motion in which the proof masses move in a parallelfashion along the y-direction. Thus, in at least some embodiments thelinear motion of the runners is in a direction perpendicular to thecorresponding motion of the proof masses. In the non-limiting situationin which the MEMS device 100 is a gyroscope, the y-direction mayrepresent the drive or sense direction, and thus the runners 108 a and108 b may constrain the proof masses to linear anti-phase motion in thedrive or sense modes. As will be described further below, additionalrunners may be provided to ensure linear anti-phase motion in both driveand sense modes, and in at least some embodiments the combination ofrunners may ensure linear anti-phase motion in both drive and sensemodes with zero net momentum.

The runners 108 a and 108 b move in opposite directions of each other inat least some embodiments. For example, when the runner 108 a moves tothe right along the direction of the x-axis, the runner 108 b may moveto the left along the direction of x-axis, and vice versa. This linearmotion of the runners may be achieved by suitable configuration of therunner itself and/or the manner in which it is coupled to the proofmasses. In some embodiments, the runners are rigid bars which arecoupled to pivoting linkages which themselves are coupled to the proofmasses 102 a and 102 b. The pivoting motion of the pivoting linkages mayresult in linear motion of the runners 108 a and 108 b. An example isdescribed below in connection with FIG. 2A.

The runners 108 a and 108 b may be formed of any suitable material. Inat least some embodiments, the runners 108 a and 108 b are formed of thesame material as the proof masses 102 a and 102 b, and are formed fromthe substrate 104 by suitable micromachining (e.g., lithography andetching). The runners 108 a and 108 b may be substantially identical,including having substantially identical masses, to provide the MEMSdevice 100 with symmetry. The runners 108 a and 108 b may have lengthsparallel to the x-axis and widths parallel to the y-axis, with thelengths being between two and 100 times greater than the widths (or anyvalue within that range), as a non-limiting example.

While FIG. 1A illustrates in simplified form two runners 108 a and 108b, it should be appreciated that more than two runners may be, and insome embodiments are, included. In some embodiments, more than tworunners are provided on a given side of the proof masses 102 a and 102b. The multiple runners on a given side may be configured to move inopposite directions of each other, providing a momentum balancedconfiguration. In some embodiments, multiple runners are included onmultiple sides of an arrangement of proof masses, with an equal numberof the runners moving in opposite directions to provide balanced motion,thus not imparting any net momentum to the MEMS device. An example isdescribed below in connection with FIG. 1F.

It should be appreciated that the MEMS device 100 may optionally includefeatures in addition to those illustrated, and that the nature of anysuch additional features may depend on the type of device (e.g.,gyroscope, accelerometer, resonator). For example, one or more anchorsmay be included to anchor components such as the proof masses 102 a and102 b to the substrate 104. Electrical features, including drive andsense electrodes, may be included and may assume any suitable form forproviding drive and sense operation. Other features may also beincluded.

As described above, in at least some aspects of the present applicationa MEMS device (e.g., a gyroscope) may include multiple proof massesconfigured to exhibit synchronous, antisymmetric movement. For example,the proof masses 102 a and 102 b of gyroscope 100 may be coupledtogether to provide synchronous, antisymmetric motion. FIGS. 1B-1Eillustrate state diagrams of such antisymmetric motion. In thosefigures, the x and y-axes have the same orientation as in FIG. 1A.

For purposes of explanation, it will be assumed that the MEMS device 100is a gyroscope and that the x-axis represents the direction of the drivemotion. That is, the proof masses 102 a and 102 b are driven along thex-axis. The y-axis will represent the direction of the response torotation, and thus can be considered to be the sense axis in thisexample.

FIGS. 1B and 1C illustrate motion of the proof masses 102 a and 102 b inthe drive mode, and show that the motion is antisymmetric. As shown inFIG. 1B, when the proof mass 102 a moves to the left (in the negativex-direction), the proof mass 102 b moves to the right (in the positivex-direction). As shown in FIG. 1C, when the proof mass 102 a moves tothe right (in the positive x-direction), the proof mass 102 b moves tothe left (in the negative x-direction). The motion may be synchronous inthat motion of one of the proof masses may cause motion of the other.

FIGS. 1D and 1E illustrate antisymmetric motion of the proof masses 102a and 102 b in the sense mode. As shown in FIG. 1D, when the proof mass102 a moves up (in the positive y-direction), the proof mass 102 b movesdown (in the negative y-direction). As shown in FIG. 1E, when the proofmass 102 a moves down (in the negative y-direction), the proof mass 102b moves up (in the positive y-direction). Again, the motion may besynchronous in that motion of one of the proof masses may cause motionof the other.

While FIGS. 1B-1E illustrate linear motion in the up-down and left-rightdirections, it should be appreciated that any combination of such motionmay be implemented by a MEMS device. For example, the motion of themasses may instead be along a diagonal direction (e.g., at 45 degrees tothe x and y-axes), among other possibilities. For example, the driveaxis may be at 45° to the x-axis and the sense axis may be at 135° tothe x-axis. Other orientations are possible. Also, while FIGS. 1B-1C aredescribed as relating to a drive mode of operation and FIGS. 1D-1E asense mode, it should be appreciated that the drive and sense directionsmay be reversed. In general, it should be appreciated that FIGS. 1B-1Emerely represent an example of anti-phase motion which may beimplemented by a MEMS device having two movable masses, and that thedirections of motion and designation of drive and sense modes may takevarious forms. For example, the drive and sense modes may be reversedcompared to those described.

The antisymmetric (or “anti-phase”) motion illustrated in FIGS. 1B-1Emay be desirable in at least some embodiments. The runners 108 a and 108b are configured, in at least some embodiments, to constrain the proofmasses to anti-phase motion along at least one of the axes (e.g., anaxis perpendicular to the direction of motion of the runners). Forexample, the runners may enforce linear anti-phase motion of the proofmasses in the drive mode, in the sense mode, or in both. This isachieved in some embodiments by making the runners resistant tosymmetric motion. An example of a suitable runner configurationresistant to, and therefore inhibiting, such symmetric motion isillustrated in FIG. 2A and described further below.

As described above, in some embodiments a MEMS device may includemultiple runners on a single side of the coupled proof masses. Referringagain to FIG. 1A, having the runners 108 a and 108 b move in oppositedirections may provide the desired antisymmetric motion of the proofmasses 102 a and 102 b, but may undesirably allow symmetric motion ofthe proof masses by providing a net linear momentum between runners.Thus, aspects of the present application provide gyroscopes havingbalanced runner configurations in which there is no net momentum orother form of imbalance resulting from the linear motion of the runners.FIG. 1F illustrates an example.

The MEMS device 120 of FIG. 1F, which may be any of the types of MEMSdevices previously described, includes many of the same components asthe MEMS device 100 of FIG. 1A, but differs in that there are multiplerunners on the same sides of the proof masses 102 a and 102 b. That is,in addition to the runners 108 a and 108 b, runners 122 a and 122 b areincluded. Like runners 108 a and 108 b, runners 122 a and 122 b may beconfigured to move linearly, and may allow for, or enforce,antisymmetric motion of the proof masses 102 a and 102 b along they-axis while preventing symmetric motion along the y-axis. Moreover, therunner 122 a may be configured to move in an opposite direction to thatof runner 108 a, and runner 122 b may be configured to move in anopposite direction to that of runner 108 b. In this manner, there may beno net momentum imparted to the MEMS device 120 by the linear motion ofthe runners 108 a, 108 b, 122 a, and 122 b. Further still, the runners122 a and 122 b may have masses substantially equal to each other, andsubstantially equal to those of runners 108 a and 108 b, thus providinga balanced configuration which does not have any net linear momentumassociated with the linear motion of the runners because they have equalmasses which move by equal amounts in opposite directions.

The runners 122 a and 122 b may be formed of the same material asrunners 108 a and 108 b, and may be formed in substantially the samemanner, for example being formed during the same lithography and etchingsteps as used to form the runners 108 a and 108 b.

FIG. 2A illustrates a gyroscope having multiple proof masses coupledtogether by linearly moving runners, of the type illustrated in FIG. 1A.While a gyroscope is shown and described, it will be appreciated thatother types of MEMS devices may utilize the runners and structuresillustrated therein, such as, but not limited to, resonators andaccelerometers. The gyroscope 200 includes proof masses 202 a and 202 bcoupled by linearly moving runners 208 a and 208 b. In addition, thegyroscope 200 includes shuttles 204 a and 204 b corresponding to proofmasses 202 a and 202 b, respectively, and a number of pivoting linkages206 a-206 h. Pivoting linkages 206 a, 206 b, 206 c, and 206 d correspondto proof mass 202 a and pivoting linkages 206 e, 206 f, 206 g, and 206 hcorrespond to proof mass 202 b. Moreover, the gyroscope includes tethers212 coupling the proof masses 202 a and 202 b to the respective shuttles204 a and 204 b. In this non-limiting example, there are eight tethers212 coupling each of the proof masses to its respective shuttle. Anchors210 support the pivoting linkages 206 a-206 h and hence the shuttles 204a and 204 b, with the pivoting linkages and shuttles being connected byhinges 214. In this example, there are eight anchors 210 associated witheach of the proof masses. Electrode regions 216 may include oraccommodate electrodes for driving the proof masses 202 a and 202 balong the x-axis, and electrode regions 218 may include or accommodateelectrodes for sensing motion of the proof masses 202 a and 202 b alongthe y-axis in response to rotation of the gyroscope in the plane of thepage.

The shuttles 204 a and 204 b are movable, and are also optional. Asshown, each of shuttles 204 a and 204 b is segmented in thisnon-limiting example. Stated another way, the illustrated shuttles maybe considered multi-part shuttles, or likewise the shuttles 204 a and204 b could each be considered four separate shuttles. For purposes ofdescription, shuttle 204 a is described herein as including foursegments (or parts) 205 a, 205 b, 205 c, and 205 d. Shuttle 204 b isdescribed herein as including four segments (or parts) 205 e, 205 f, 205g, and 205 h. Multi-part shuttles of this type allow for a portion (orpart) of the shuttle to move in the drive mode and a different portionto move in the sense mode.

As described, the shuttles are optional. They may be included tosuppress misalignment of the drive force and/or misalignment of thesense force by resisting motion orthogonal to the desired motion.However, not all embodiments include such shuttles. Some embodimentsinclude proof masses, pivoting linkages, and runners, but not shuttles.The proof mass may be directly coupled to the pivoting linkage in suchembodiments.

The pivoting linkages 206 a-206 h are included to reduce or entirelyeliminate quadrature. Quadrature is the motion of the proof masses inthe direction orthogonal to the drive motion, which is ideally 90° outof phase with the Coriolis response. Typically, quadrature isundesirable, as the gyroscope may be unable to distinguish betweenelectrical signals resulting from quadrature as opposed to thoseresulting from rotation, and thus the accuracy of the gyroscope atdetecting rotation may be negatively impacted by the occurrence ofquadrature.

Each of the illustrated pivoting linkages includes two segmentsconnected by a connector 217, an example of which is described below inconnection with FIGS. 2E-1, 2E-2, and 2E-3. The two segments of thepivoting linkage may be of substantially equal length. In this state ofoperation, which corresponds to the state shown in FIG. 2A for all thepivoting linkages, the two segments of the pivoting linkage incombination form a substantially rigid bar at an equilibrium position.When a shuttle moves linearly away from a given pivoting linkage, thepivoting linkage may flex (or bend) because the connector may flex.However, the connector 217 may resist torsion and/or shear, therebyinhibiting tilt of the pivoting linkage and preventing rotation of theshuttle (and the mass connected to it). The pivoting linkage reduces orprevents entirely quadrature motion of the gyroscope by inhibitingunwanted rotation or tilt of the shuttle (and the mass connected to it),while allowing the desired linear motion.

The pivoting linkages are connected to anchors 210 at the pivot pointsand are hingedly connected to the shuttles by hinges 214. In thismanner, the pivoting linkages may pivot about the anchors 210 inresponse to the shuttles 204 a and 204 b being driven as well as inresponse to the shuttles 204 a and 204 b moving as a result ofexperiencing a Coriolis force.

The non-limiting example of FIG. 2A illustrates a MEMS device whichexhibits symmetry. Not all embodiments are limited in this respect.

FIG. 2B illustrates a close-up view of the tether 212 of gyroscope 200of FIG. 2A. In this non-limiting example, the tether 212 is a doublefolded tether, connecting at a single point to the shuttle 204 a (or 204b) and at two points to the proof mass 202 a (or 202 b). The shape ofthe tether is not limiting, as various suitable tether configurationsmay be used to allow motion of the proof mass relative to the shuttle.

FIG. 2C is a close-up view of an anchor 210 and pivot point of the typeincluded in the gyroscope of FIG. 2A. In this non-limiting example, theanchor 210 supports the pivoting linkage 206 a at a pivot 223. Theshuttle 204 a has a shape generally conforming to the shape of theanchor 210, but is not directly or rigidly connected to the anchor 210,and thus is free to move relative to the anchor 210. Given theillustrated nesting arrangement of the anchor 210 and the shuttle 204 a,it should be appreciated that the shuttle can move significantly more inthe direction illustrated by arrow 220 than in the direction illustratedby the arrow 222. In some embodiments, the shuttle may be unable to moveat all in the direction of arrow 222. The other anchors of the gyroscope200 may have substantially the same construction and arrangement withrespect to the pivoting linkages to which they connect.

FIG. 2D is a close-up view of a hinge of the type included in thegyroscope 200 of FIG. 2A. The hinge 214 includes an L-shaped flexuralbeam 224 in the pivoting linkage 206 a (or other pivoting linkage of thegyroscope) allowing pivoting and preventing translation of the pivotinglinkage segment relative to the pivot point 225. However, otherconfigurations are possible. The pivoting linkage 206 a connects to theshuttle 204 a at a single corner 225 in this non-limiting example.According to an embodiment, all the hinges of the gyroscope 200 havesubstantially the same configuration.

FIG. 2E-1 is a cartoon representation of a middle portion of a pivotinglinkage, including a connector 217 of the type connecting the segmentsof a pivoting linkage, as may be employed by any and all of pivotinglinkages 206 a-206 h. The connector 217 is illustrated in FIG. 2E-1 withrespect to pivoting linkage 206 a specifically, and the segments 207 aand 207 b, but the same configuration may apply to the other pivotinglinkages of the gyroscope 200. The pivoting linkage 206 a includessegments 207 a and 207 b. The connector 217 may be a relatively narrowand short beam coupling the two segments 207 a and 207 b together. Theconnector 217 may flex when the two segments 207 a and 208 b pivot inopposite directions about their respective pivot points at anchors 210,but may resist shear or torsion. Thus, the connector 217 may preventpivoting of the two segments 207 a and 207 b in the same direction.FIGS. 2E-2 and 2E-3 illustrate allowed and rejected motion of thestructure of FIG. 2E-1.

In FIG. 2E-2, the segments 207 a and 207 b pivot in opposite directionsof each other around the pivot points supported by their respectiveanchors 210, as shown by the circular arrows. The connector 217 flexesto allow this pivoting. The illustrated state of deformation arises whenthe shuttle segment 205 a translates downward in the figure. FIG. 2E-3illustrates deformation associated with the segments 207 a and 207 bpivoting in the same direction about their respective pivot points. Asshown, this would correspond to the shuttle segment 205 a exhibitingtilting motion, and would involve the connector 217 shearing. However,the connector resists this motion, and therefore the tilting illustratedin FIG. 2E-3 is prevented by the pivoting linkage configuration,including the connector 217. Thus, if the mass, or the shuttle, isattached to the oppositely pivoting segments (e.g., through hinges orother flexure types), the pivoting linkage system ensures linear motionof the mass (or the shuttle) and reduces unwanted rotation caused by twosegments pivoting in the same direction. As a result, the pivotinglinkage with the properly designed connector 217 may prevent unwantedquadrature motion.

FIG. 2F-1 is a close-up view of a box spring connector 219 for couplingneighboring proof masses in the gyroscope of FIG. 2A. More specifically,the box spring connector 219, which is a non-limiting example of thecoupler 114 of FIG. 1A, couples pivoting linkages of the neighboringproof masses, in this case pivoting linkages 206 d and 206 f. The boxspring connector 219 may have any suitable size and shape. It may bepositioned to allow the connected pivoting linkages 206 d and 206 f torotate in opposite directions. The box spring may resist shear motion,thus preventing the pivoting linkages 206 d and 206 f from rotating inthe same direction. In this manner, the pivoting linkages connected bythe box spring may allow for or enforce anti-phase motion of the proofmasses 202 a and 202 b while rejecting in-phase motion in the x-axisdirection with respect to the arrangement of FIG. 2F-1. Examples ofallowed and prevented motion are shows in FIGS. 2F-2 and 2F-3,respectively.

In FIG. 2F-2, the pivoting linkages 206 d and 206 f pivot in oppositedirections as each other about the pivot points supported by theirrespective anchors 210. The box spring connector 219 allows such motionby stretching in the vertical direction of the figure. By contrast, FIG.2F-3 illustrates a state in which the pivoting linkages 206 d and 206 fpivot in the same direction as each other about the pivot pointssupported by their respective anchors. To allow this motion, the boxspring connector 219 would itself rotate counterclockwise, in thedirection opposite to that in which pivoting linkages 206 d and 206 fpivot. The box spring 219 resists such motion, thus enforcing thedesired motion of FIG. 2F-2.

The box spring connector 219 is a non-limiting example of a suitableconnector for coupling the neighboring pivoting linkages of thegyroscope 200. As an alternative, a straight beam connector may be used.

FIG. 2G is a close-up view of a coupler 221 coupling the runners to theshuttle of the gyroscope 200 of FIG. 2A. As shown, the coupler 221 maybe a half-box spring connector. However, any suitable connector may beimplemented which causes the runner 208 a to move linearly in responseto pivoting of the pivoting linkage 206 e. That is, with respect to thearrangement of FIG. 2G, the coupler 221 causes the runner 208 a to moveto the right (arrow 226 a) when the right side of the pivoting linkagemoves down (arrow 228 a), and causes the runner to move to the left(arrow 226 b) when the right side of the pivoting linkage moves up(arrow 228 b).

Referring again to FIG. 2A, in operation the gyroscope 200 may exhibitsynchronous, anti-phase motion. When the shuttle segments 205 b and 205d move to the right, in the positive x-direction, the upper segment ofpivoting linkage 206 b and the upper segment of pivoting linkage 206 dpivot clockwise, while the lower segment of pivoting linkage 206 b andthe lower segment of pivoting linkage 206 d pivot counterclockwise. Theshuttle segments 205 f and 205 h will move to the left, in the negativex-direction. In particular, the upper segment of pivoting linkage 206 fand the upper segment of pivoting linkage 206 h will pivotcounterclockwise, while the lower segment of pivoting linkage 206 f andthe lower segment of pivoting linkage 206 h will pivot clockwise.

In the sense mode, in response to rotation of the gyroscope 200, whenthe shuttle segments 205 a and 205 c move downward, in the negativey-direction, the left segment of pivoting linkage 206 a and the leftsegment of pivoting linkage 206 c will pivot counterclockwise, while theright segment of pivoting linkage 206 a and the right segment ofpivoting linkage 206 c will pivot clockwise. The shuttle segments 205 eand 205 g will move upward, in the positive y-direction, due to therunners 208 a and 208 b. The left segment of pivoting linkage 206 e andthe left segment of pivoting linkage 206 g will pivot clockwise, and theright segment of the pivoting linkage 206 e and the right segment of thepivoting linkage 206 g will pivot counterclockwise. The runners 208 aand 208 b constrain the proof masses and shuttles to such motion. Thatis, runner 208 a forces the right segment of pivoting linkage 206 a andthe left segment of pivoting linkage 206 e to rotate in the samedirection (clockwise or counterclockwise) by itself moving linearly tothe right or left. Similarly, the runner 208 b forces the right segmentof pivoting linkage 206 c and the left segment of pivoting linkage 206 gto rotate in the same direction by itself moving linearly right or left,in the opposite direction of runner 208 a. However, because the runners208 a and 208 b may be rigid bars, or other rigid couplers, they preventthe coupled segments of the pivoting linkages from rotating in oppositedirections. Thus, the runners 208 a and 208 b inhibit, or prevententirely, in-phase motion of the shuttles 204 a and 204 b in the sensemode. Therefore, acceleration of a type which tends to induce in-phasemotion of the shuttles 204 a and 204 b will not be detected.Accordingly, the runners 208 a and 208 b provide an accelerationinsensitive gyroscope.

As described above in connection with FIG. 1F, in some embodiments aMEMS device, such as a MEMS gyroscope, may include a balanced runnerconfiguration in which multiple runners are included on a same side ofthe coupled proof masses. FIG. 2H illustrates a non-limiting example ofan implementation of such a gyroscope. The gyroscope 250 includes manyof the same components already illustrated and described in connectionwith FIG. 2A, and thus they are not described again in detail here.However, the gyroscope 250 differs from the gyroscope 200 in that itincludes a balanced runner configuration, with two runners, which movelinearly, on each side of the coupled proof masses. In particular, thegyroscope 250 includes runners 252 a, 252 b, 254 a, and 254 b.

The runner 252 a is coupled to left-most segment of pivoting linkage 206a by a coupler 256 a, and to the right-most segment of the pivotinglinkage 206 e by a coupler 256 b. Similarly, the runner 252 b is coupledto the left-most segment of pivoting linkage 206 c by a coupler 256 c,and to the right-most segment of pivoting linkage 206 g by the coupler256 d. The couplers 256 a-256 d may be the same as each other, and maybe the type of coupler shown in FIG. 2G, or any other suitable couplerallowing for linear motion of the runners 252 a and 252 b in oppositedirections as each other.

The runner 254 a is coupled to the right-most segment of pivotinglinkage 206 a by a coupler 258 a, and to the left-most segment ofpivoting linkage 206 e by coupler 258 b. The runner 254 b is coupled tothe right-most segment of pivoting linkage 206 c by a coupler 258 c, andto the left-most segment of pivoting linkage 206 g by a coupler 258 d.The couplers 258 a-258 d may be the same as each other, and may be thetype of coupler shown in FIG. 2G, or any other suitable coupler allowingfor linear motion of the runners 254 a and 254 b in opposite directionsas each other.

Because the runners 252 a and 254 a are coupled to different segments ofthe pivoting linkage 206 a and 206 e as each other, and because thosedifferent segments will rotate in opposite directions as each other, therunners 252 a and 254 a will move in opposite linear directions as eachother during operation, which will be described further below inconnection with FIG. 2I. Likewise, because the runners 252 b and 254 bare coupled to different segments of the pivoting linkage 206 c and 206g as each other, and because those different segments will rotate inopposite directions as each other, the runners 252 b and 254 b will movein opposite linear directions as each other during operation. In total,then, the runners 252 a and 252 b will move in opposite directions aseach other, and runners 254 a and 254 b will move in opposite directionsas each other. Thus, there will be substantially no net linear momentumfrom the combination of runners 252 a-252 b and 254 a-254 b as long astheir masses and velocities are equal, referred to as momentum balance.This then provides a balanced runner configuration which does not impartundesired in-phase (symmetric) motion of the proof masses.

The runners 252 a and 252 b are substantially identical to each other,as are the runners 254 a and 254 b. All four of the runners may havesubstantially the same mass, thus providing a balanced configuration. Inthe illustrated example, runners 252 a and 252 b are longer (in thex-direction) than are runners 254 a and 254 b. The runners 254 a and 254b may be wider in the y-direction than runners 252 a and 252 b toprovide substantially equal masses, or may have any other suitableconfiguration. It can be seen that in this example all four of therunners are longer in the x-direction than in the y-direction. Thelengths in the x-direction may be between two and 100 times greater thanthe widths in the y-direction, or any value within that range.Alternative dimensions are possible.

It can also been seen from FIG. 2H that for the illustrated non-limitingexample the runners 252 a and 254 a assume a nested configuration. Therunner 254 a is proximate the proof masses while the runner 252 a isdistal the proof masses. The same is true of the runners 254 b and 252b, respectively. Other configurations are possible.

FIG. 2I illustrates one state of operation of the gyroscope 250 of FIG.2H, and shows the balanced operation of the runners 252 a, 252 b, 254 a,and 254 b. In the illustrated state of operation, which may represent astate of the sense mode of operation, the proof mass 202 a and theshuttle segments 205 a and 205 c move upward, in the positivey-direction. The proof mass 202 b, and the shuttle segments 205 e and205 g move downward, in the negative y-direction. The left-most segmentof pivoting linkage 206 a and the right-most segment of pivoting linkage206 e pivot clockwise about their respective pivot points, such that therunner 252 a moves to the right, in the positive x-direction. Theleft-most segment of the pivoting linkage 206 c and the right-mostsegment of pivoting linkage 206 g pivot clockwise about their respectivepivot points, such that the runner 252 b moves to the left, in thenegative x-direction, and therefore opposite the direction of the runner252 a.

The right-most segment of pivoting linkage 206 a and the left-mostsegment of pivoting linkage 206 e rotate counter-clockwise about theirrespective pivot points, such that the runner 254 a moves linearly tothe left, in the negative x-direction. The right-most segment ofpivoting linkage 206 c and the left-most segment of pivoting linkage 206g rotate counterclockwise, such that the runner 254 b moves linearly tothe right, in the positive x-direction, and therefore opposite to therunner 254 a. Thus, symmetric (in-phase) motion of the proof masses isrejected due to the runners.

Thus, it can be seen from the state of operation in FIG. 2I that abalanced runner configuration is provided in which the four runners movelinearly but have a net momentum of zero. This, then, reduces thelikelihood of imparting undesired motion to the gyroscope 250.

FIG. 2J illustrates a close-up cartoon representation of a portion ofthe gyroscope 250, providing another illustration of the motion of therunners. In particular, FIG. 2I illustrates a state of operation inwhich the shuttle segment 205 a moves downward, in the negativey-direction, and the shuttle segment 205 e moves upward, in the positivey-direction. It can be seen that the left-most segment of pivotinglinkage 206 a and the right-most segment of pivoting linkage 206 e pivotcounterclockwise, such that the runner 252 a moves linearly to the left,in the negative x-direction. The right-most segment of pivoting linkage206 a and the left-most segment of pivoting linkage 206 e pivotclockwise, such that the runner 254 a moves linearly to the right, inthe positive x-direction.

In some embodiments, multiple runners on a same side of coupled proofmasses of a gyroscope may be coupled together. FIG. 2K illustrates anon-limiting example, showing a variation on the configuration of FIG.2J. In FIG. 2K, the runners 252 a and 254 a are coupled by a coupler, orlinkage, 260. The coupler 260 may be oriented generally perpendicular toboth runners 252 a and 254 a and may have a length selected to provide adesired degree of flexibility/rigidity. The coupler 260 may berelatively short compared to the lengths of the runners in thex-direction in some embodiments, although not all embodiments arelimited in this respect.

While FIGS. 2H-2K illustrate examples in which multiple runners arearranged next to each other on a side of coupled proof masses, otherconfigurations for providing balanced runners are possible. According tosome embodiments, multiple runners are arranged linearly on a side ofcoupled proof masses. The multiple runners may be constrained onmultiple sides. An example is shown in FIG. 2L.

FIG. 2L shows a partial view of a gyroscope having multiplelinearly-arranged runners as an alternative to runners 252 a and 254 a.The partial view shows part of shuttle segments 205 a and 205 e,previously described, but omits the remainder of the shuttles and proofmasses for simplicity of illustration. Some of the components have beendescribed previously in connection with other embodiments, and thus arenot described in detail here. As shown, the device may include multiplelinearly-arranged runners 270 a, 270 b, and 270 c, arranged along acommon axis (or line) P-P. In addition, pivoting linkages 272 a and 272b are included and coupled to opposite sides of the runners 270 a-270 cas are the pivoting linkages 206 a and 206 e. The pivoting linkages 272a and 272 b may be the same type of pivoting linkages as pivotinglinkages 206 a and 206 e, and may be coupled to anchors 274 in the samemanner as pivoting linkages 206 a and 206 e couple to anchors 210. Theanchors 274 and 210 have the same construction in some embodiments,including pivots as previously described in connection with anchors 210.

The runner 270 a may be coupled on one side to pivoting linkage 272 a bya coupler 276 a, and on the other side to pivoting linkage 206 a by acoupler 276 b. The runner 270 b may be coupled on one side to pivotinglinkage 272 a by a coupler 276 c, and on the other side to pivotinglinkage 206 a by a coupler 276 d. Runner 270 b may also be coupled onone side to pivoting linkage 272 b by a coupler 276 e and on the otherside to pivoting linkage 206 e by a coupler 276 f. Runner 270 c may becoupled on one side to pivoting linkage 272 b by a coupler 276 g and onthe other side to pivoting linkage 206 e by coupler 276 h. The couplers276 a-276 h may be of the type illustrated and described previously inconnection with FIG. 2G, or may be any other suitable type of couplerproviding linear motion of the runners 270 a-270 c in response topivoting of the pivoting linkages 206 a, 206 e, 272 a, and 272 b.

In operation, the runners 270 a and 270 c move in an opposite directionto that of runner 270 b. The runners 270 a and 270 c may have a combinedmass substantially equal that of runner 270 b, thus providing a balancedconfiguration in which the net linear momentum of the runners is zero,and therefore the runners do not impart undesired motion to the shuttlesand/or proof masses. Therefore, in some embodiments the runners 270 aand 270 c are shorter than the runner 270 b. In some such embodiments,the runners 270 a and 270 c have lengths equal to approximately half thelength of the runner 270 b.

It should be appreciated that while FIG. 2L illustrates a partial viewof a gyroscope, the linearly-arranged runners may be mirrored on theopposite sides of the shuttles and proof masses of the gyroscope. Thatis, the runners 252 b and 254 b in FIG. 2I may be replaced with aconfiguration like that of FIG. 2L.

The runners 270 a-270 c force antisymmetric motion of the shuttlesegments 205 a and 205 e in the sense mode of operation, and preventsymmetric motion. Thus, gyroscopes (or other MEMS devices) implementingthe runner configuration of FIG. 2L may exhibit reduced accelerationsensitivity compared to gyroscopes lacking such runners.

FIG. 2M illustrates an alternative to the configuration of FIG. 2L, inwhich the runners are directly connected to each other. Only part of thestructure of FIG. 2L is shown, focusing on the connection between runner270 a and 270 b. As shown, those two runners may be connected togetherat their adjacent ends by a coupler 278. The coupler 278 is illustratedas including a T-connection at the end of each of runners 270 a and 270b, but alternative coupling configurations are possible. The coupler 278is flexural, allowing runners 270 a and 270 b to move relative to eachother. Likewise, runners 270 b and 270 c may be directly coupled to eachother in the same manner, although they are not shown in FIG. 2M.

FIG. 2N illustrates a state of deformation of a structure of the typeillustrated in FIG. 2M. In this figure, more of the components from FIG.2L are reproduced than are shown in FIG. 2M. For example, shuttlesegment 205 e, pivoting linkage 206 e, runner 270 c, and pivotinglinkage 272 b are additionally illustrated. The runners 270 b and 270 care directly coupled together at adjacent ends by a coupler 280 whichmay be of the same type as coupler 278 described in connection with FIG.2M.

In FIG. 2N it is seen that when the shuttle segments 205 a and 205 emove in linear anti-phase motion (here, the shuttle segment 205 a moveslinearly upward in the figure while shuttle segment 205 e moves linearlydownward), the runners 270 a and 270 c move linearly in the samedirection (to the right in this example) as each other and in anopposite direction to runner 270 b (which moves leftward in thisfigure). The couplers 278 and 280 may flex, allowing such motion.

The configurations of FIGS. 2L, 2M, and 2N may be said to illustrate aMEMS device (e.g., a gyroscope) with constrained runners. The runners270 a-270 c are constrained on two, opposite sides (proximate and distalthe proof masses/shuttles) along their length. This is in contrast tothe configuration of FIG. 2H in which the runners are coupled topivoting linkages on a single side along their length.

As described above, use of two or more proof masses in a MEMS device,such as a MEMS gyroscope can have certain advantages. The use of fourproof masses may provide reduced sensitivity to vibration rectification(or g×g sensitivity) and linear acceleration (or g sensitivity) bymechanical cancellation of common mode signals. The use of four proofmasses may also provide zero momentum imbalance, which can in turnreduce sensitivity to package modes, thereby eliminating cross-talkbetween multiple gyroscope cores. The geometric symmetry of using fourproof masses may also allow a gyroscope to be used in mode-matchedoperation, which improves the signal-to-noise ratio (SNR), as well asallowing for self-calibration of the gyroscope on-the-fly (withoutinterrupting its normal operation). Thus, scale-factor and offsetstability may be improved, and recalibration using a shaker or ratetable in the laboratory may be avoided. To realize such benefits, thefour masses may be mechanically coupled to ensure synchronous motion.Moreover, use of linearly moving couplers of the types described hereinmay facilitate enforcing anti-phase motion of the four proof masseswhile resisting unwanted translation motion which is sensitive tovibrations (e.g., in phase motion).

Thus, aspects of the present application use linearly moving couplers ofthe types described herein to couple together four proof masses to forma synchronized mass gyroscope. The architectural challenge for MEMSgyroscopes is to preserve two degrees of freedom, since gyroscopeoperation uses both the resonator mode (drive-mode) and the Coriolissensitive mode (sense-mode). The synchronized mass gyroscopes describedherein may include linearly moving couplers which enforce linearanti-phase motion of the four coupled proof masses in the drive mode,the sense mode, or both, without causing interference between the two.Further still, the couplers are arranged to provide no net momentum, inat least some embodiments.

FIG. 3A illustrates in simplified form a MEMS device according to anaspect of the present application, having four proof masses coupled byrunners of the types previously described herein, configured to resist(or inhibit) symmetric motion of each neighboring pair of the proofmasses and allow or enforce linear anti-phase motion of the proofmasses. The MEMS device 300 represents an extension of the MEMS device100 of FIG. 1A, with the addition of two proof masses 102 c and 102 d,and various couplers providing coupling of the four proof masses. Morespecifically, the MEMS device 300 includes the first proof mass 102 aand second proof mass 102 b, a third proof mass 102 c, a fourth proofmass 102 d, the substrate 104, tethers 306 a-306 h, runners 108 a, 108b, 108 c, 108 d, 122 a, 122 b, 122 c, and 112 d, and couplers 114 a, 114b, 114 c, and 114 d. The tethers 306 a-306 h may be the same type asdescribed previously in connection with tethers 106 a-106 f, or anyother suitable type. The couplers 114 a-114 d may be the same type ascoupler 114 described previously in connection with FIG. 1A, or anyother suitable type. The runners 108 a-108 d and 122 a-122 d may be anyof the types of runners described herein.

The runners 108 a-108 d and 122 a-122 d may enforce linear anti-phasemotion of the proof masses 102 a-102 d parallel to the x andy-directions. For example, the runners 108 a, 108 b, 122 a, and 122 bmay enforce linear anti-phase motion of the proof masses 102 a-102 dparallel to the y-direction. The runners 108 c, 108 d, 122 c, and 122may enforce linear anti-phase motion of the proof masses 102 a-102 dparallel to the x-direction. However, the motion of the proof massesalong the x and y-directions may be decoupled from each other.

FIG. 3A illustrates that in some embodiments a gyroscope having a proofmass arrangement including four proof masses may include linearly movingbalanced runners on opposite sides of the arrangement. The runners maymove in the directions indicated by the arrows 110 a, 110 b, 110 c, and110 d, as illustrated. Momentum balanced operation may be realized byproperly selecting the masses such that the combined momenta of theindividual masses are offset. For example, runners 108 a, 122 a, 108 b,and 122 b may have substantially equal masses and may be arranged totranslate in opposite directions (e.g., 108 a opposite 122 a, and 108 bopposite 122 b) such that they move with equal and opposite momenta, andtherefore cancel each other out. However, it should be appreciated thatnot all embodiments are limited in this respect, as a MEMS gyroscopeaccording to alternative embodiments may have four masses coupled byrunners of the types described herein which are momentum imbalanced. Forexample, in one embodiment a MEMS gyroscope may omit the runners 122a-122 d.

FIGS. 3B-3E illustrate in block diagram form different states ofanti-phase motion of the proof masses 102 a-102 d of FIG. 3A accordingto a non-limiting embodiment. For purposes of discussion, it is assumedthat the MEMS device 300 is a gyroscope having both drive and sensemodes. FIG. 3B illustrates in block diagram form a first state of linearanti-phase motion of the proof masses 102 a-102 d in a drive mode ofoperation, according to a non-limiting embodiment. As illustrated, themotion of proof masses 102 a-102 d is anti-phase in that the motion ofany given mass of the four is in an opposite direction to that of thetwo direct neighboring masses. In the illustrated non-limiting example,proof masses 102 a and 102 d move linearly in the negative x-directionwhile proof masses 102 b and 102 c move linearly in the positivex-direction. The motion may be synchronous in that motion of one of theproof masses may cause motion of the others.

FIG. 3C illustrates a second state of the anti-phase motion of the drivemode. In this state, the proof masses 102 a-102 d have reverseddirection compared to FIG. 3B. The proof masses 102 a and 102 d movelinearly in the x-direction while proof masses 102 b and 102 c movelinearly in the negative x-direction.

FIG. 3D illustrates a state of anti-phase motion of the proof masses 102a-102 d in a sense mode of operation, according to a non-limitingembodiment. In this non-limiting example, proof masses 102 a and 102 dmove linearly in the y-direction while proof masses 102 b and 102 c movelinearly in the negative y-direction. Again, the motion may besynchronous in that motion of one of the proof masses may cause motionof the others.

FIG. 3E illustrates a second state of the anti-phase motion of the sensemode. In this state, the proof masses 102 a and 102 d move linearly inthe negative y-direction while the proof masses 102 b and 102 c move inthe y-direction.

While FIGS. 3B-3E illustrate linear motion of the proof masses in theup-down and left-right directions, it should be appreciated that anycombination of such motion may be implemented by a MEMS device. Forexample, the motion of the proof masses may instead be along a diagonaldirection (e.g., at 45 degrees to the x and y-axes), among otherpossibilities. For example, the drive axis may be at 45° to the x-axisand the sense axis may be at 135° to the x-axis. Other orientations arepossible. Also, while FIGS. 3B-3C are described as relating to a drivemode of operation and FIGS. 3D-3E a sense mode, it should be appreciatedthat the drive and sense directions may be reversed. In general, itshould be appreciated that FIGS. 3B-3E merely represent an example oflinear anti-phase motion which may be implemented by a MEMS devicehaving four movable masses, and that the directions of motion anddesignation of drive and sense modes may take various forms.

The runners 108 a-108 d and 122 a-122 d prioritize anti-phase motion ofthe proof masses 102 a-102 d, while rejecting spurious modes which canbe excited by linear acceleration and angular acceleration.Specifically, the runners 108 a-108 b and 122 a-122 d prioritizeanti-phase motion in the y-direction while runners 108 c-108 d and 122c-122 d prioritize anti-phase motion in the x-direction. In doing so,the MEMS device 300 may be substantially insensitive or immune to linearacceleration and angular acceleration, thus providing more accurateoperation of the MEMS device as a gyroscope. The runners may enforce thelinear anti-phase motion by mode ordering the modes of the MEMS devicesuch that those modes susceptible to external forces are atsignificantly higher frequencies than the desired modes of operation. Inthis manner, spurious modes may be rejected.

FIGS. 4A-4B illustrate an example of a four-proof-mass synchronized massgyroscope in two states of deformation, according to a non-limitingembodiment. FIG. 4A illustrates a state of deformation for which theproof masses of the MEMS gyroscope 400 undergo linear anti-phase motionparallel to the x-axis, while FIG. 4B illustrates a state of deformationfor which the proof masses of the MEMS gyroscope 400 undergo linearanti-phase motion parallel to the y-axis.

The synchronized mass MEMS gyroscope 400 includes proof masses 402 a-402d coupled to respective shuttles 404. Four pivoting linkages 406 areprovided for each of the four proof masses. A total of eight runners areprovided, including four runners 408 and four runners 410. The runners408 are of the type described previously in connection with runners 252a and 252 b, and runners 410 are of the type described previously inconnection with runners 254 a and 254 b.

In FIG. 4A, the synchronized mass MEMS gyroscope is deformed inconnection with linear anti-phase motion of the proof masses 402 a-402 dparallel to the x-axis. Specifically, proof masses 402 a and 402 d aredisplaced in the negative x-direction from their equilibrium positionsand proof masses 402 b and 402 c are displaced in the x-direction. Thismotion may be associated with a drive mode of operation of the MEMSgyroscope, as a non-limiting example. In this state, the runners 408 and410 on the left and right sides of the proof mass arrangement aredisplaced in the directions indicated by the bold arrows. Specifically,the runners 408 coupling proof mass 402 a with 402 c and proof mass 402b with 402 d are displaced in the negative y-direction and the runners410 coupling those proof masses are displaced in the y-direction. Therunners 408 and 410 coupling proof mass 402 a with 402 b and proof mass402 c with 402 d are not displaced in this state of operation.

In FIG. 4B, the synchronized mass MEMS gyroscope is deformed inconnection with linear anti-phase motion of the proof masses 402 a-402 dparallel to the y-axis. Specifically, proof masses 402 a and 402 d aredisplaced in the y-direction from their equilibrium positions and proofmasses 402 b and 204 c are displaced in the negative y-direction. Thismotion may be associated with a sense mode of operation of the MEMSgyroscope, as a non-limiting example. In this state, the runners 408 and410 coupling the proof mass 402 a with 402 b and proof mass 402 c with402 d are displaced in the directions indicated by the bold arrows.Specifically, the runners 408 are displaced in the x-direction and therunners 410 are displaced in the negative x-direction. The runners 408and 410 coupling proof mass 402 a with 402 c and proof mass 402 b with402 d are not displaced in this state of operation.

It should be appreciated from FIGS. 4A-4B that the runners 408 and 410may enforce linear anti-phase motion of the proof masses 402 a-402 d inboth the x and y-directions, but that the motion of the proof masses inthose two directions is decoupled. Thus, two degrees of freedom areprovided, facilitating accurate operation of the device as a gyroscope.

While synchronized mass MEMS gyroscope 400 illustrates runners of thetype described previously in connection with FIGS. 2H and 2I, it shouldbe appreciated that any of the types of runners described herein may beused. For example, the constrained runners of FIGS. 2L and 2M mayinstead be implemented in place of runners 408 and 410. Thus, theparticular construction of MEMS gyroscope 400 is a non-limiting exampleof a synchronized mass gyroscope.

FIG. 4C illustrates an alternative configuration of a synchronized massgyroscope. The synchronized mass gyroscope 420 includes four proofmasses 402 a-402 d, the tethers 212, pivoting linkages 406, runners 408and 410, coupler 260, and shuttle 422. In this non-limiting example, therunners 408 are coupled with respective runners 410 by the couplers 260.The couplers 260 are of the type illustrated in FIG. 2K, and weredescribed previously in connection with that figure. They may berelatively short, but allow the runners 408 and 410 to move relative toeach other. In FIG. 4C, each runner 408 is coupled to a respectiverunner 410 by three couplers 260. However, other numbers of couplers 260may be used, including a single coupler 260 coupling a runner 408 to acorresponding runner 410.

In the synchronized mass gyroscope 420 of FIG. 4C, the pivoting linkages406 are coupled directly to the proof masses, rather than couplingthrough a shuttle. Here, the shuttle 422 is made smaller than theshuttles 404 of FIGS. 4A-4B, which may provide the gyroscope 420 with alarger angular gain. Angular gain is the ratio of the mass responding tothe angular rotation to the total modal mass of the sense mode.

It should be appreciated from the foregoing that aspects of the presentapplication provide synchronized mass gyroscopes. The synchronized massgyroscopes may have four coupled proof masses configured to movelinearly along transverse directions, and a plurality of runnersdisposed at a periphery of the proof mass arrangement that enforcelinear anti-phase motion of the proof masses. The runners themselvesmove linearly, and may do so in a momentum balanced manner such thatthey have a net momentum of substantially zero. The runners may decouplemotion of the proof masses parallel to one axis from motion of the proofmasses parallel to a second axis. Thus, drive and sense modes may remaindecoupled from each other, while both modes may exhibit linearanti-phase motion.

As has been described, aspects of the present application provide MEMSdevices including multiple movable proof masses coupled by couplerswhich constrain the proof masses to linear, anti-phase motion, and inwhich the couplers themselves move linearly. The devices may beresonators, gyroscopes, or accelerometers, among other possible devices.Various systems may employ such devices. Accordingly, various aspects ofthe present application provide MEMS devices having runners of the typesdescribed herein, with the devices being used in various settings todetect rotation, including sports, healthcare, military, and industrialapplications, among others. Some non-limiting examples are nowdescribed.

A system employing a MEMS device of the types described herein mayinclude a power source coupled to the device, processing circuitry(e.g., sense circuitry) configured to process electrical signalsgenerated by the device to assess a characteristic of interest, such asrotation, and/or communication circuitry to communicate with externaldevices, wirelessly or by a wired connection. Such components may becombined into a single housing, thus providing an integrated product.

MEMS devices of the types described herein may be used in a variety ofdevices, products, and settings. One such setting is in vehicles, suchas automobiles, boats, and aircraft. FIG. 5 illustrates an example inwhich a MEMS device the types described herein is employed in a car. Inthe example of FIG. 5, an automobile 500 includes a control unit 502coupled to an onboard computer 504 of the car by a wired or wirelessconnection 506. Control unit 502 may comprise a MEMS sensor or MEMSdevice of the types described herein, optionally together with a powersource, processing circuit, interface circuitry for communicating overthe connection 506, or any other suitable components. As a non-limitingexample, the control unit 502 may include a MEMS gyroscope of the typesdescribed herein. The MEMS gyroscope may sense yaw of the automobile500, as an example. The control unit 502 may comprise a package orhousing attached to a suitable part of the automobile 500, with the MEMSdevice inside. Control unit 502 may receive power and control signalsfrom the onboard computer 504, and may supply sense signals to theonboard computer 504.

Another setting in which MEMS devices of the types described herein maybe used is in sensor devices for sports applications, such as tennis,swimming, running, baseball, or hockey, among other possibilities. Insome embodiments, a MEMS gyroscope of the types described herein may bepart of a wearable fitness device. In other embodiments, the sensor maybe part of a piece of sporting equipment, such as being part of a tennisracket, baseball bat, or hockey stick. Sense data from the sensor may beused to assess performance of the user.

Various embodiments described to this point have illustrated operationof gyroscopes with respect to detecting rotation in the plane of theproof masses. Such gyroscopes are referred to as yaw gyroscopes.However, the use of runners as described herein may be applied togyroscopes detecting other forms of rotation, in addition to or as analternative to detecting yaw. For example, gyroscopes detecting both yawand pitch, both roll and pitch, or all three of yaw, roll, and pitch,may utilize runners of the types described herein, coupling multipleproof masses together and linearly translating in response to anti-phasemotion of the proof masses. Thus, it should be appreciated that thoseembodiments described herein relating to gyroscopes are not limited inthe type of gyroscope provided.

Various embodiments described to this point provide MEMS gyroscopes withlinearly moving couplers coupling together two or more proof masses ofthe gyroscope. Such couplers may also be used with multiple-massresonators. Thus, aspects of the present application provide resonatorshaving a plurality of proof masses coupled together by linearly movingcouplers.

Aspects of the present application provide MEMS devices (e.g.,gyroscopes, accelerometers, and resonators) exhibiting variousbeneficial characteristics, at least some of which have been describedalready. It should be appreciated that not all aspects of theapplication necessarily provide each benefit, nor are the benefitslimited to those described herein. Some examples are now described.

According to aspects of the present application, multiple-proof-massMEMS devices are provided, exhibiting a low degree of accelerationsensitivity (which may also be described as being accelerationinsensitive). Thus, gyroscopes, for example, may exhibit highly accurateperformance with respect to rotation detection. Some aspects of thepresent application provide MEMS gyroscopes which operate in a anantisymmetric manner in both drive and sense modes. Aspects of thepresent application provide MEMS gyroscopes which are relativelyinsensitive to quadrature, in addition to those benefits describedabove. Moreover, the fabrication of such devices including runners maybe relatively simple and accurate compared with fabrication of othertypes of couplers. Thus, high precision MEMS devices exhibiting highlyaccurate synchronous, anti-phase motion may be realized even withmanufacturing errors associated with typical microfabricationtechniques.

The terms “approximately” and “about” may be used to mean within ±20% ofa target value in some embodiments, within ±10% of a target value insome embodiments, within ±5% of a target value in some embodiments, andyet within ±2% of a target value in some embodiments. The terms“approximately” and “about” may include the target value.

What is claimed is:
 1. A multiple-mass, balanced microelectromechanicalsystems (MEMS) device, comprising: a substrate; a first proof masscoupled to the substrate by a first tether and configured to movelinearly; a second proof mass coupled to the substrate by a secondtether and configured to move linearly; and a first coupler coupling thefirst and second proof masses together and configured to move linearlywhen the first proof mass moves in a first direction and the secondproof mass moves in a second direction opposite the first direction. 2.The multiple-mass, balanced MEMS device of claim 1, wherein the firstand second proof masses define, at least in part, a proof massarrangement, wherein the first coupler is disposed on a first side ofthe proof mass arrangement, and wherein the multiple-mass, balanced MEMSdevice further comprises a second coupler disposed on a second side ofthe proof mass arrangement opposite the first side, and configured tomove linearly opposite the first coupler when the first and second proofmasses exhibit linear anti-phase motion.
 3. The multiple-mass, balancedMEMS device of claim 1, further comprising a second coupler coupling thefirst and second proof masses together and configured to move linearlyopposite the first coupler when the first proof mass moves in the firstdirection and the second proof mass moves in the second direction,opposite the first direction, wherein the first and second couplers arecoupled to a same side of the first proof mass.
 4. The multiple-mass,balanced MEMS device of claim 3, wherein the first and second proofmasses define, at least in part, a proof mass arrangement, and whereinthe multiple-mass, balanced MEMS device further comprises third andfourth couplers on an opposite side of the proof mass arrangement fromthe first and second couplers, wherein the third coupler is configuredto move linearly in a same direction as the first coupler and the fourthcoupler is configured to move linearly in a same direction as the secondcoupler when the first proof mass moves in the first direction and thesecond proof mass moves in the second direction, opposite the firstdirection.
 5. The multiple-mass, balanced MEMS device of claim 3,wherein the first and second couplers are linearly arranged with respectto each other.
 6. The multiple-mass, balanced MEMS device of claim 3,wherein the first coupler is proximate the first and second proof massesand the second coupler is distal the first and second proof masses. 7.The multiple-mass, balanced MEMS device of claim 1, further comprising apivoting linkage coupled between the first coupler and the first proofmass, wherein the first coupler is configured to move linearly when thepivoting linkage pivots.
 8. The multiple-mass, balanced MEMS device ofclaim 7, further comprising a movable shuttle hingedly coupled to thepivoting linkage and disposed between the pivoting linkage and the firstproof mass.
 9. A method of operating a multiple-mass, balancedmicroelectromechanical systems (MEMS) device, the method comprising:moving a first proof mass and second proof mass linearly in anti-phasemotion; and linearly translating a first coupler coupling the first andsecond proof masses as the first and second proof masses move linearlyin anti-phase motion.
 10. The method of operating the multiple-mass,balanced MEMS device of claim 9, wherein the first and second proofmasses define, at least in part, a proof mass arrangement, wherein thefirst coupler is disposed on a first side of the proof mass arrangement,and wherein the method further comprises linearly translating a secondcoupler in a direction opposite the first coupler as the first andsecond proof masses move linearly in anti-phase motion, the secondcoupler being disposed on a second side of the proof mass arrangementopposite the first side.
 11. The method of operating the multiple-mass,balanced MEMS device of claim 9, further comprising linearly translatinga second coupler coupling the first and second proof masses in anopposite direction to that of the first coupler as the first and secondproof masses move linearly in anti-phase motion.
 12. The method ofoperating the multiple-mass, balanced MEMS device of claim 11, whereinthe first and second proof masses define, at least in part, a proof massarrangement, and wherein the multiple-mass, balanced MEMS device furthercomprises third and fourth couplers on an opposite side of the proofmass arrangement from the first and second couplers, wherein the methodfurther comprises linearly translating the third coupler in a samedirection as the first coupler and linearly translating the fourthcoupler in a same direction as the second coupler as the first andsecond proof masses move in linear anti-phase motion.
 13. The method ofoperating the multiple-mass, balanced MEMS device of claim 11, whereinlinearly translating the first and second couplers comprises linearlytranslating the first and second couplers along a common axis.
 14. Themethod of operating the multiple-mass, balanced MEMS device of claim 11,wherein linearly translating the first and second couplers compriseslinearly translating the first coupler along an axis proximate the firstand second proof masses and the second coupler along an axis distal thefirst and second proof masses.
 15. The method of operating themultiple-mass, balanced MEMS device of claim 9, further comprisingpivoting a pivoting linkage coupled between the first coupler and thefirst proof mass while the first coupler linearly translates.
 16. Themethod of operating the multiple-mass, balanced MEMS device of claim 15,further comprising linearly translating a shuttle hingedly coupled tothe pivoting linkage and disposed between the pivoting linkage and thefirst proof mass.
 17. A multiple-mass, balanced microelectromechanicalsystems (MEMS) device, comprising: a substrate; a first proof masscoupled to the substrate by a first tether and configured to movelinearly; a second proof mass coupled to the substrate by a secondtether and configured to move linearly; and means for inhibiting linearin-phase motion of the first and second proof masses.
 18. Themultiple-mass, balanced MEMS device of claim 17, wherein the means forinhibiting linear in-phase motion of the first and second proof massesconstrains the first and second proof masses to linear anti-phasemotion.
 19. The multiple-mass, balanced MEMS device of claim 17, whereinthe means for inhibiting linear in-phase motion of the first and secondproof masses comprises means for inhibiting rotation of the first andsecond proof masses.
 20. The multiple-mass, balanced MEMS device ofclaim 17, further comprising means for inhibiting quadrature, the meansfor inhibiting quadrature being coupled to the means for inhibitinglinear in-phase motion of the first and second proof masses.